Container for a plate-like article

A cassette for storing therein a substrate to be used in a semiconductor device manufacturing process and for being mounted into an apparatus to be used in a semiconductor device manufacturing process, said cassette comprising:

• a first cassette element having a supporting portion for supporting the substrate;
• a second cassette element cooperable with said first cassette element to define a space in which the substrate is to be stored;
• an engaging member supported by said second cassette element, said engaging member being engageable with an engagement provided on said first cassette element to prohibit separation of said first and second cassette elements from each other;
• and
• disengaging means for disengaging said engaging member from said engagement in response to a force acting in a direction of separation of said first and second cassette elements from each other, wherein
• at least one of said first and second cassette elements is made of a substantially transparent material, and said engaging member has a color different from said second cassette element.

A cassette for storing therein a substrate to be used in a semiconductor device manufacturing process and for being mounted into an apparatus to be used in a semiconductor device manufacturing process, said cassette comprising:

• a first cassette element having a supporting portion for supporting the substrate;
• a second cassette element cooperable with said first cassette element to define a space in which the substrate is to be stored, said second cassette element having a portion which is substantially transparent;
• and
• an engaging member supported by said second cassette element, said engaging member being engageable with an engagement provided on said first cassette element to prohibit separation of said first and second cassette elements from each other, said engaging member having a color different from said second cassette element, wherein
• at least one of said first and second cassette elements is made of an electrically conductive resin material.

A cassette for storing therein a substrate to be used in a semiconductor device manufacturing process and for being mounted into an apparatus to be used in a semiconductor device manufacturing process, said cassette comprising:

• a first cassette element having a supporting portion for supporting the substrate;
• a second cassette element cooperable with said first cassette element to define a space in which the substrate is to be stored, said second cassette element having a portion which is substantially transparent;
• and
• an engaging member supported by said second cassette element, said engaging member being engageable with an engagement provided on said first cassette element to prohibit separation of said first and second cassette elements from each other, said engaging member having a color different from said second cassette element, wherein
• at least one of said first and second cassette elements is provided with an arrow which indicates a direction of mounting the cassette.

A cassette for storing therein a substrate to be used in a semiconductor device manufacturing process and for being mounted into an apparatus to be used in a semiconductor device manufacturing process, said cassette comprising:

• a first cassette element having a supporting portion for supporting the substrate;
• a second cassette element cooperable with said first cassette element to define a space in which the substrate is to be stored, said second cassette element having a substantially transparent portion and an arrow which indicates a direction of mounting the cassette;
• and
• an engaging member supported by said second cassette element, said engaging member being engageable with an engagement provided on said first cassette element to prohibit separation of said first and second cassette elements from each other, wherein
• the arrow is provided at a forward end side portion of said second cassette element.

A cassette for storing therein a substrate to be used in a semiconductor device manufacturing process and for being mounted into an apparatus to be used in a semiconductor device manufacturing process, said cassette comprising:

• a first cassette element having a supporting portion for supporting the substrate;
• a second cassette element cooperable with said first cassette element to define a space in which the substrate is to be stored, said second cassette element having a substantially transparent portion and a plate guide for receiving a plate member;
• and
• an engaging member supported by said second cassette element, said engaging member being engageable with an engagement provided on said first cassette element to prohibit separation of said first and second cassette elements from each other, wherein
• at least one of said first and second cassette elements is made of an electrically conductive resin material.