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AssigneeFujitsu Limited
InventorsAtsushi Tanaka, Kazunori Yamanaka, Nobuo Kamehara, Koichi Niwa
Estimating the term…
In an oxide superconducting film wiring, when the line width is reduced, the evaporation of a component during firing becomes so vigorous that it becomes impossible to form a desired single crystal phase, which causes a significant lowering in the properties of the oxide superconducting wiring. This problem can be solved by preventing the evaporation of the evaporable component during the firing. Examples of this include a process wherein plate is placed above the superconductor forming material film wiring pattern on the substrate so as to face each other, the plate comprising a material having no chemical influence on the superconducting wiring, and a pattern of a material containing an evaporable component is arbitrarily formed, a process wherein a pattern having a smaller line width is sandwiched between patterns having a larger line width, and a process wherein the firing atmosphere or the concentration of the evaporable component in the pattern is varied depending upon the line width.
A process for producing a superconducting wiring film, comprising the steps of:
A process for producing a superconducting wiring film, comprising the steps of:
A process for producing a superconducting wiring film, comprising the steps of:
A process for producing a superconducting wiring film, comprising the steps of:
Dependencies are inferred from the claim text.