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AssigneesMitsubishi Kasei Corporation, Mitsubishi Kasei Engineering Company, Nippon Pillar Packing Co., Ltd.
InventorsKazuhisa Isayama, Norihiro Takasaki, Eiji Kariya, Toshiyuki Fukumoto
Estimating the term…
A coupling device intended to prevent impurities such as dust and particles adhering to the end face of a solution supplying male pipe 2 from being mixed with a high purity chemical solution N, which will be supplied through the device, not to degrade the purity of the solution. It includes a check valve 7 arranged in that end portion of a solution passage 5 in the male pipe 2 which is inserted into a cleaning chamber 15, a valve pusher 44a arranged in that end portion of a solution passage 43 in a solution supplied female pipe 3 which is connected to the passage 5 in the male pipe 2 to push the check valve 7 to open the passage 5, a valve system for opening and closing the passage 43 when the female pipe 3 is reciprocated in the axial direction, and a check valve 51 located on the outlet side of a cleaning liquid passage 48.
In a coupling device comprising means for fixing a solution supplying male pipe, which is to be inserted into a cleaning chamber, adjacent and in opposite to a solution supplied female pipe which is arranged in the cleaning chamber, and means for moving the solution supplied female pipe in such a direction that it can be connected to the solution supplying male pipe, said coupling device further comprising a check valve arranged in that end portion of a solution passage in the male pipe which is located on the side of the female pipe;
Dependencies are inferred from the claim text.