Cleaning apparatus
AssigneesTokyo Electron Limited, Tokyo Electron Saga Limited
InventorMitsuo Nishi
Life of this patent
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Abstract
A cleaning apparatus includes a cleaning unit provided with cleaning tubs in which cleaning liquid is contained, and a carrying mechanism for carrying matters to be processed into and out of the cleaning unit. The carrying mechanism has holding members for holding the matters thereon. The cleaning apparatus further includes a chamber in which the carrying mechanism is housed, and a cleaning/drying system arranged in an upper portion of the chamber to clean and dry the matters-holding members of the carrying mechanism. The cleaning/drying system has cleaning and drying nozzles through which cleaning liquid and drying air are jetted against the matters-holding members of the carrying mechanism.
Claims11
A cleaning apparatus comprising:
- a cleaning unit having cleaning tubs in which cleaning liquid is contained;
- means for carrying matters to be processed into and out of the cleaning unit and having matters-holding members;
- a chamber in which the carrying means is housed;
- and
- means located in an upper portion of the chamber to clean and dry the holding members of said carrying means, said cleaning and drying means including cleaning and drying nozzles through which cleaning liquid and dried air are jetted against the holding members of said carrying means.
Dependencies are inferred from the claim text.