Back to results
US 5,311,599 AGranted
Method and apparatus for optical testing of samples
AssigneeCarl-Zeiss-Stiftung
InventorKlaus Freischlad
Life of this patent
Estimating the term…
Abstract
Described are a method and apparatus for the optical testing of samples in which a camera records a plurality of images of an interferogram or a bar pattern. Phase values are determined for each image point of each camera record, and then differences between the phase values of adjacent points in each image line and column are computed in modulo 2.pi.. These differences for each image point are summed over the plurality of camera images. After a number of images sufficient to assure desired accuracy have been summed, a single discontinuity elimination is carried out. This permits the rapid averaging of measurements over the plurality of camera images in real video time and remarkably reduces the measuring time and statistical errors.
Claims10
Apparatus for optical testing of a sample in which information pertaining to the sample, in the form of light patterns recorded along a raster of image points, is evaluated as a plurality of phase images, the apparatus comprising:
- a light source positioned to direct light at said sample to generate light pattern images that vary in relative brightness in accordance with information pertaining to said sample;
- a camera having a raster of image points for separately recording a plurality of said light pattern images;
- a computer that determines the phase values of a plurality of phase images in accordance with the relative brightness of said light pattern images as recorded at each image point along said raster of image points;
- a differentiator that determines variations in the phase values of each said phase image by determining the differences, in modulo 2.pi., between the computed phase values of adjacent image points, said differentiator having an output;
- image storage means for storing said determined variations in the phase values of each said phase image as the differences between phase values determined by said differentiator, said image storage means having an input and an output;
- and
- an adder for generating the sum of (a) the differences between phase values of adjacent image points for a first one of said phase images and (b) the differences between the phase values for said same adjacent image points for a second one of said phase images, said adder having a first and a second input and an output said first input of said adder being connected to the output of said differentiator, said second input of said adder being connected to the output of said image storage means, and said output of said adder being connected to the input of said image storage means.
4 more elements
An interferometer for optically testing a sample, said interferometer comprising:
- a light source for generating a light beam;
- an optical measuring path and an optical reference path;
- means for positioning said sample in said optical measuring path;
- means for (a) deflecting said light beam both onto said sample in said optical measuring path and into said optical reference path, and (b) generating a light pattern image that varies in relative brightness in accordance with information pertaining to said sample, said image being generated by interference of the light from said optical measuring path and said optical reference path;
- a camera having a raster of image points for separately recording a plurality of said light pattern images;
- a computer than determines the phase values of a plurality of phase images in accordance with the relative brightness of said light pattern images as recorded at each image point along said raster of image points;
- a differentiator that determines variations in the phase values of each said phase image by determining the differences, in modulo 2.pi., between the computed phase values of adjacent image points, said differentiator having an output;
- image storage means for storing said determined variations in the phase values of each said phase image as the differences between phase values determined by said differentiator, said image storage means having an input and an output;
- and
- an adder for generating the sum of (a) the differences between phase values of adjacent image points for a first one of said phase images and (b) the differences between the phase values for said same adjacent image points for a second one of said phase images, said adder having a first and a second input and an output;
- said first input of said adder being connected to the output of said differentiator, said second input of said adder being connected to the output of said image storage means, and said output of said adder being connected to the input of said image storage means.
8 more elements
Apparatus for optical testing of a sample, said apparatus comprising:
- a light source for generating a light beam;
- means for spatially modulating said light beam to generate a periodic brightness pattern;
- means for projecting said periodic brightness pattern onto said sample;
- a camera having a raster of image points for separately recording a plurality of images of said periodic brightness pattern generated by the projection of said modulated light beam onto said sample;
- a computer that determines the phase values of a plurality of phase images in accordance with the relative brightness of said light pattern images as recorded at each image point along said raster of image points;
- a differentiator that determines variations in the phase values of each said phase image by determining the differences, in modulo 2.pi., between the computer phase values of adjacent image points, said differentiator having an output;
- image storage means for storing said determined variations in the phase values of each said phase image as the differences between phase values determined by said differentiator, said image storage means having an input and an output;
- and
- an adder for generating the sum of (a) the differences between phase values of adjacent image points for a first one of said phase images and (b) the differences between the phase values for said same adjacent image points for a second one of said phase images, said adder having a first and a second input and an output;
- said first input of said adder being connected to the output of said differentiator, said second input of said adder being connected to the output of said image storage means, and said output of said adder being connected to the input of said image storage means.
7 more elements
An apparatus for optically testing a sample in which information pertaining to the sample, in the form of a light pattern, is detected by a camera having a raster of image points and is evaluated along a raster of the image points, said apparatus comprising:
- a light source for directing light at said sample to generate light pattern images that vary in intensity in accordance with information pertaining to said sample;
- a camera for separately detecting each of said light pattern images and converting said images into respective electrical signals;
- a computer receiving said electrical signals to process said signals to separately determine the relative brightness of each image point of each said separately detected image by computing a corresponding phase value, expressed in modulo 2.pi., for each image point;
- a differentiator to determine the differences in relative brightness between each said image point and its respective adjacent image points for each separately detected image by separately calculating the differences, in modulo 2.pi., between the phase values of adjacent image points for each said separately detected image;
- an adder for summing said separately-calculated phase value differences pertaining to the same individual image point as detected in each of said separately detected plurality of light pattern images and forming adder output signals;
- and,
- said computer receiving said adder output signals to determine the integral multiple of 2.pi. of said phase values from said summed differences.
4 more elements
Dependencies are inferred from the claim text.