Soft X-ray microscope
AssigneeOlympus Optical Co., Ltd.
InventorYoshiaki Horikawa
Life of this patent
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Abstract
A soft X-ray microscope comprising a soft X-ray radiation source which is substantially a spot radiation source, a condenser for leading soft X-rays from the radiation source to a sample, a reflecting mirror for grazing incidence which is disposed between the radiation source and the condenser, and has a rough reflecting surface, an objective optical system for forming a magnified image of the sample, and a soft X-ray detector for receiving the soft X-rays from the objective optical system. This microscope exhibits excellent imaging characteristic even when it uses a spot radiation source.
Claims9
A soft X-ray microscope comprising:
- a spot, soft X-ray radiation source for generating soft X-rays;
- a condenser for directing said soft X-rays generated by said soft X-ray radiation source to a sample;
- an objective optical system for receiving said soft X-rays from said sample and forming a magnified image of said sample;
- a soft X-ray detector for receiving and detecting the soft X-rays from said objective optical system;
- and
- a grazing incidence mirror for reflecting said soft X-rays generated by said soft X-ray radiation source before the X-rays are directed by said condenser, the grazing incidence mirror having a rough reflecting surface with a sufficient roughness to diffuse the soft X-rays incident thereon wherein said roughness has an RMS value substantially equal to or larger than a wavelength of the soft x rays.
Dependencies are inferred from the claim text.