Apparatus and method for detecting particles on a substrate
AssigneeHoriba, Ltd.
InventorsMinoru Taniguchi, Masaaki Ishihara, Takashi Hagiwara
Life of this patent
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Abstract
An apparatus and method for observing the location of minute particles on a substrate and adjusting for any inclination of the substrate surface is provided. A support station can mount a substrate for movement in both the X and Y planes and in the vertical plane. A laser scanning optical device can determine the locations of minute particles. The coordinates of any inclination of support surface is determined and is used to vary the particle positions so that a subsequent examination by a microscope will be easily accomplished with an in-focus position.
Claims7
An apparatus for observing the location of minute particles on a substrate, comprising:
- means for moving a substrate;
- means for determining any inclination of a substrate surface relative to a predetermined plane and providing data defining coordinates of inclination;
- means for determining a location of any particles on a substrate and providing data defining the coordinates of such particles;
- means for magnifying the particles to permit observation including means for defining a focal plane in which the particles are in focus, and
- means for activating the moving means in accordance with the data of the coordinates of a particle and the data of the coordinates of inclination to position the substrate within the focal plane of the magnifying means to enable an observer to view an enlargement of a particle in an in-focus position.
An apparatus for observing the location of minute particles on a substrate, comprising:
- a base member;
- substrate mounting means for movably mounting a substrate including guide rails for defining movements in a horizontal X and Y plane and a cam and cam follower for defining movements in a vertical Z plane;
- means for moving the substrate including electric motors and encoders for monitoring the movement of the motors;
- means for providing data of coordinates of any inclination of a substrate surface relative to a predetermined plane;
- means for determining a location of any particles on a substrate and providing data defining the coordinates of such particles including a scanning laser to contact the substrate surface and detector means to receive the laser light after incidence with the substrate surface;
- means for magnifying the particles including means for defining a focal plane, and
- means for activating the electric motors and encoders in accordance with the data of the coordinates of a particle an the data of the coordinates of inclination to position the substrate within the focal plane of the magnifying means to enable an observer to view an enlargement of particles in an in-focus position.
A method of observing minute particles on a substrate with a magnifying device having a focal plane at a predetermined position, comprising the steps of:
- determining any inclination of a substrate surface relative to a predetermined plane containing the substrate and providing data defining coordinates of inclination;
- scanning the substrate surface with a laser beam;
- determining locations of any particles on the substrate form contact of the laser beam with particles and providing data defining the coordinates of such particles;
- calculating an appropriate movement of the substrate to a focal plane based on the data of the coordinates of inclination and data of the coordinates of a particle;
- moving the substrate based on the calculated results, and
- observing the minute particle.
Dependencies are inferred from the claim text.