Pellicle mounting apparatus
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsMasaki Suzuki, Kentaro Shingo
Life of this patent
Estimating the term…
Abstract
A pellicle mounting apparatus adheres a pellicle frame to a surface of a reticle glass under pressure. The apparatus includes a reticle glass support device for supporting the reticle glass and pellicle frame support device for supporting the pellicle frame. An elastic pressure member is provided on the pellicle frame support device in contact with the pellicle frame along a periphery thereof. The pressure member has a sufficiently small reaction to deformation under the pressure applied to the pellicle frame as compared with the pressure. A pressurizing device applies fluid pressure uniformly to the periphery of the pellicle frame via the elastic pressure member.
Claims18
A pellicle mount apparatus for adhering a pellicle frame to a surface of a reticle glass under pressure, said pellicle mount apparatus comprising:
- a reticle glass support for supporting a reticle glass;
- a pellicle frame support for supporting a pellicle frame;
- an elastic pressure member provided on said pellicle frame support for contacting a pellicle frame along the periphery of the pellicle frame;
- and
- a pressurizing means for uniformly applying fluid pressure to the periphery of the pellicle frame through said elastic pressure member wherein said pressurizing means comprises:
- a fluid pressure transfer portion disposed on said pellicle frame support adjacent to and along the periphery of said elastic pressure member, said fluid pressure transfer portion comprising an incompressible fluid;
- and
- a pressurizing device for applying pressure to said elastic pressure member through said fluid pressure transfer portion.
A pellicle mount apparatus for adhering a pellicle frame to a surface of a reticle glass under pressure, said pellicle mount apparatus comprising:
- a reticle glass support for supporting a reticle glass;
- a first pellicle frame support for supporting a second pellicle frame;
- a second pellicle frame support for supporting a second pellicle frame;
- an elastic pressure member provided on one of said pellicle frame supports for contacting a pellicle frame along the periphery of the pellicle frame;
- and
- a pressurizing means for uniformly applying fluid pressure to the periphery of the pellicle frame through said elastic pressure member wherein said pressurizing means comprises:
- a fluid pressure transfer portion disposed on said pellicle frame support adjacent to and along the periphery of said elastic pressure member, said fluid pressure transfer portion comprising an incompressible fluid;
- and
- a pressurizing device for applying pressure to said elastic pressure member through said fluid transfer portion.
A pellicle mount apparatus, comprising:
- a reticle glass support;
- a pellicle frame support adjacent to said reticle glass support;
- a pressure member mounted on said pellicle frame support for holding a pellicle frame along the periphery of the pellicle frame;
- a fluid pressure transfer portion in said pellicle frame support along the periphery of and contacting said pressure member, said fluid pressure transfer portion comprising an incompressible fluid;
- and
- a pressure device for applying pressure to said pressure member through said fluid pressure transfer portion.
Dependencies are inferred from the claim text.