Laser machining apparatus

A laser machining apparatus which comprises a mask having light transmitting portions which allow a laser light received from a light source to pass through and reflecting portions which reflect said laser light, a reflecting mirror, mounted substantially in parallel with said mask and separated by a predetermined distance from said mask, which causes the laser light received from the reflecting portions to reflect toward said mask, and an imaging optical system, for machining a work by laser light which passes through the light transmitting portions of the mask, the laser machining apparatus comprising:

• means for causing said work to move in parallel with said mask for machining the work.

A laser machining apparatus which comprises a mask having light transmitting portions which allow a laser light received from a light source to pass through and reflecting portions which reflect said laser light, a reflecting mirror, mounted substantially in parallel with said mask and separated by a predetermined distance from said mask, which causes the laser light received from the reflecting portions to reflect toward said mask, and an imaging optical system, for machining a work by laser light which passes through the light transmitting portions of the mask, the laser machining apparatus comprising:

• means for causing said mask and said work to move synchronously and in parallel to each other for machining the work.

A laser machining apparatus which comprises a mask having light transmitting portions which allow a laser light received from a light source to pass through and reflecting portions which reflect said laser light, a reflecting mirror, mounted substantially in parallel with said mask and separated by a predetermined distance from said mask, which causes the laser light received from the reflecting portions to reflect toward said mask, and an imaging optical system, for machining a work by laser light which passes through the light transmitting portions of the mask, the laser machining apparatus comprising:

• means for causing a multiple reflection optical system comprised of the mask and the reflecting mirror and an imaging optical system to move in parallel to each other for machining the work.

A laser machining apparatus comprising:

• a mask which has transmitting portions which allow laser light from light source to pass through and reflecting portions which reflect the laser light from the light source;
• an imaging optical system which causes the mask pattern to image on a work surface which is in the same plane of the mask surface.

A laser machining apparatus comprising:

• a mask which has transmitting portions which allow laser light from light source to pass through and reflecting portions which reflect the laser light from the light source;
• a connection pantograph which holds the mask and the work in parallel at a distance in the same plane;
• an imaging optical system which causes the laser light passed through said transmitting protions of the mask to image in the plane where the mask is located.