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US 5,310,625 AGranted
Process for forming negative tone images of polyimides using base treatment of crosslinked polyamic ester
AssigneeInternational Business Machines Corporation
InventorsMarie Angelopoulos, Daniel G. Berger, Jeffrey W. Labadie, Eric D. Perfecto, Martha I. Sanchez, Sally A. Swanson, Willi Volksen
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Abstract
The present invention relates to an improved process for forming negative tone images of photosensitive polyimides on a substrate having improved wall angles.
Claims4
A process for generating a negative tone image of polyimide on a substrate comprising the steps of:
- (a) coating the substrate with a film comprising polyamic ester and a photoinitiator, the ester substituent of said polyamic ester having a crosslinkable functionality;
- (b) imagewise exposing the film to radiation to crosslink said polyamic ester;
- (c) developing the image;
- (d) contacting said film with a base selected from amine or quaternary ammonium salt;
- (e) heating said film to imidize said polyamic ester
2 more elements
Dependencies are inferred from the claim text.