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US 5,310,623 AGranted
Method for fabricating microlenses
AssigneeLockheed Missiles & Space Company, Inc.
InventorGeorge Gal
Life of this patent
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Abstract
A microlens of any designed configuration is formed as a replica in a photoresist material, and the photoresist material replica is used to reproduce the replica directly in a substrate material.
Claims8
A method of fabricating in a photoresist material a replica of a designed microlens of any designed configuration, using a single exposure mask, and reproducing the replica directly in a substrate material, said method comprising,
- constructing a single exposure mask with a plurality of precisely located and sized light transmitting openings formed with sufficiently small specific opening sizes and located at a sufficiently large number of specific locations, correlated to related locations on the configuration of the designed microlens, to enable a replica image of the designed microlens to be produced in a photoresist material.
- exposing a related photoresist material to light of a selected wavelength and transmitted through said openings in said single mask for a selected duration of time,
- processing the exposed photoresist material to produce a replica in the photoresist material of the designed microlens, which replica can be used subsequently for producing the designed microlens in a substrate material,
- placing the photoresist material replica on a substrate material, and
- processing the replica and the substrate material to reproduce the replica directly in the substrate material.
2 more elements
Dependencies are inferred from the claim text.