Method of making an acceleration sensor
AssigneeRobert Bosch GmbH
InventorsMichael Offenberg, Martin Willmann
Life of this patent
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Abstract
A method of making acceleration sensors with integrated measurement of internal pressure includes connecting multiple plates to each other, thereby defining internal cavities. The tightness of these connections or bonds is checked and controlled during the manufacturing process. The plates define membrane portions adjacent each cavity, the membranes deforming in accordance with the internal pressure in the adjacent cavity. Preferably, the internal pressure of the sensor is measurable by detecting deformation of a sensor wall which defines a membrane.
Claims8
Method of making an acceleration sensor, comprising
- connecting together at least an upper plate (3) and a lower plate (2), and
- forming a cavity (4) between said plates,
- in such a way that
- at least one of said plates (2, 3) defines a membrane (5) which deforms in response to an internal pressure in said cavity, thereby facilitating immediate detection of any faulty connection between said plates.
Method of making an acceleration sensor, comprising
- connecting together at least an upper plate (24), a lower plate (21), and at least one intermediate plate (22, 23), and
- forming a cavity (26, 27) between said plates,
- in such a way that
- at least one of said plates (22,23) defines a membrane (5) which deforms in response to an internal pressure in said cavity, and
- forming respective openings (7) adjacent each membrane (5), so that all of said membranes (5) are accessible from outside.
Dependencies are inferred from the claim text.