Convection transfer system
AssigneeInternational Business Machines Corporation
InventorArthur R. Zingher
Life of this patent
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Abstract
A system provides for convective transferring of material between a workpiece and a flowing fluid which chemically reacts with the workpiece. A gap is formed between the workpiece and a facesheet. The fluid is fed to supply nozzles, travels a short distance within the gap adjacent to the facesheet and exits via return nozzles. The flow cross section and flow density facilitate convective transfer at a moderate flow rate and low fluid pressure. The system is also applicable for chemical transfer such as plating or etching printed circuit boards.
Claims6
A system for transferring material with a workpiece by convection comprising:
- a fluid which chemically reacts with the workpiece;
- supply means including a plurality of supply nozzles;
- return means including a plurality of return nozzles;
- a facesheet coupled to said supply means and said return means and disposed opposite the workpiece for forming a gap therebetween through which said fluid flows;
- the system characterized such that material is added to the workpiece from the fluid flowing through the supply means, the gap and the return means.
An apparatus for fabricating a pattern on a printed circuit board comprising:
- fluid supply means including a plurality of supply nozzles;
- an etchant fluid return means including a plurality of return nozzles;
- and
- a facesheet coupled to said fluid supply means and said fluid return means disposed opposite a printed circuit board thereby forming a gap between said facesheet and the printed circuit board, so that when said etchant fluid flows through said fluid supply means and said supply nozzles, a short segment through said gap and through said fluid return nozzles and said fluid return means a pattern is fabricated on the printed circuit board.
An apparatus for fabricating a pattern on a printed circuit board comprising:
- fluid supply means including a plurality of supply nozzles;
- fluid return means including a plurality of return nozzles;
- and
- a facesheet coupled to said fluid supply means and said fluid return means disposed opposite a printed circuit board including a resist pattern thereby forming a gap between said facesheet and the printed circuit board, so that when a fluid flows through said fluid supply means and said supply nozzles, a short segment through said gap and through said fluid return nozzles and said fluid return means a pattern is fabricated on the printed circuit board.
Dependencies are inferred from the claim text.