Profilometer stylus assembly insensitive to vibration
AssigneeTencor Instruments
InventorWilliam R. Wheeler
Life of this patent
Estimating the term…
Abstract
A stylus profilometer having a counterbalanced stylus with a motion transducer using a vane moving between parallel, spaced-apart, conductive plates which damp the motion of the vane by means of trapped air. The vane forms an electrode with the plates so that the combination is a pair of capacitors in a balanced bridge arrangement. Motion of the stylus causes an unbalance of the bridge indicative of the extent of stylus motion. A lever arm associated with the stylus has a tip influenced by a magnetic field which biases the stylus or controls force on a surface to be measured. The entire assembly has a very low moment of inertia to reduce the effects of vibration on the stylus and thereby increase resolution of the device and reduce damage to the substrate.
Claims13
A profilometer assembly comprising,
- an elongated stylus arm and counterbalance having a first end with a hard stylus mounted for contact with a substrate disposed below the arm and a second end, opposite the first end having a vane for motion between two parallel plates, the stylus arm having a pivot between the first and second ends, said parallel plates forming a stylus displacement measurement transducer with said vane, and
- a variable force member associated with the first end of the stylus arm for urging the first end into contact with said substrate.
A profilometer assembly comprising,
- a measurement stylus mounted at the end of an arm for contact with a substrate,
- a pivot member having opposed forward and rearward sides and a central region therebetween mounted for turning on an axis defined from a relatively massive member, the pivot member supporting said arm on the forward side and a counterweight member on the rearward side, the counterweight including a force transducer having means for signaling motion of the pivot member, and
- means for adjustably biasing the forward side of the pivot member, thereby urging said stylus into contact with the substrate, having a coil spaced from said pivot member, a ferromagnetic core extending through the coil and a lever in magnetic communication with the core, transmitting force induced by the coil, to the forward side of the pivot member, the lever connected to the pivot member but spaced from said coil and core.
A profilometer assembly comprising,
- a measurement stylus mounted at the end of an arm for contact with a substrate,
- a pivot member having opposed forward and rearward sides and a central region therebetween mounted for turning on an axis defined from a relatively massive member, the pivot member supporting said arm on the forward side and a counterweight member on the rearward side, the counterweight including a force transducer having means for signaling motion of the pivot member, and
- means for adjustably biasing the forward side of the pivot member, thereby urging said stylus into contact with the substrate.
- wherein the force transducer means comprises a pair of spaced-apart, parallel plates with a movable vane therebetween, the vane connected to the rearward side of the pivot member whereby motion of the stylus member is transmitted through the pivot member to the vane.
A profilometer assembly comprising,
- a stylus arm for step-height measurements of a substrate,
- a pivot member supporting the stylus arm,
- a vane supported by the pivot member, rearwardly of the stylus arm, partially counterbalancing the stylus arm and having a mass-radius squared product in combination with the stylus arm not exceeding 0.5 gm-cm.sup.2, wherein the vane moves in air between and generally parallel to two parallel plates, the air between the parallel plates damping motion of the vane,
- whereby the momentum of the arm is minimized in order to reduce damage to substrates.
Dependencies are inferred from the claim text.