Back to results
US 5,309,064 AGranted
Ion source generator auxiliary device
OwnerAnthony J. Arminiinventor
Life of this patent
Estimating the term…
Abstract
An ion source generating device having a main arc chamber and an auxiliary chamber attached to and in communication with the main chamber. The auxiliary chamber contains metal chips of barium, calcium or cerium to provide a reduction reaction of feed gas passing through the chamber and into the main chamber, in which ion beams are generated.
Claims9
An ion source for producing an ion beam from a feed gas comprising:
- an arc chamber having an inlet orifice and an outlet orifice;
- an auxiliary chamber in fluid communication with said arc chamber;
- a feed gas input line into said auxiliary chamber;
- a filament for generating electrons in said arc chamber, together with a power source for heating and biasing said filament;
- and
- a metal chip reactant contained in said auxiliary chamber which provides a reduction reaction of the feed gas passing therethrough.
3 more elements
A method of generating an ion beam from an arc chamber, comprising the steps of:
- attaching an auxiliary chamber to a wall of the arc chamber, with an orifice providing fluid communication therebetween;
- providing a reactant material of metal chips in said auxiliary chamber;
- heating said arc chamber up to a temperature of about 900.degree. C. to about 1000.degree. C. with an energizable electron emitting filament thereacross:
- passing a feed gas under pressure through said metal chips in said auxiliary chamber so as to form a stable solid fluoride compound therein;
- emitting an ion beam from an exit orifice in said heated arc chamber.
2 more elements
Dependencies are inferred from the claim text.