Inductive coil for inductively coupled plasma production apparatus
AssigneeDavid Sarnoff Research Center, Inc.
InventorBawa Singh
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Abstract
The invention is directed to an induction coil which includes a flat spirally wound portion and a tubular spirally wound portion extending from the outer edge of the flat portion. The axis of the tubular portion is substantially perpendicular to the flat portion. The coil is useful in a plasma production apparatus which includes a chamber having walls and adapted to be evacuated. A window extends into the chamber from one of the walls. The coil is in the window with the flat portion being at the bottom of the window.
Claims16
An induction coil comprising a flat coil portion having a plurality of turns and a tubular coil portion extending from the outer edge of the flat coil portion, the axis of the tubular coil portion being substantially perpendicular to the flat coil portion.
A plasma production apparatus comprising:
- a chamber having walls and adapted to be placed under a vacuum;
- an electrode in the chamber;
- a cup-shaped window extending into the chamber through one of the walls;
- and
- an induction coil in the well formed by the window, said coil having a flat coil portion with a plurality of turns at the bottom of the well and a tubular portion extending from the flat portion.
Dependencies are inferred from the claim text.