Wafer scale or full wafer memory system, packaging method thereof, and wafer processing method employed therein
AssigneeHitachi, Ltd.
InventorsMasanori Tazunoki, Hiromitsu Mishimagi, Makoto Homma, Toshiyuki Sakuta, Hisashi Nakamura, Keiji Sasaki, Minoru Enomoto, Toshihiko Satoh, Kunizo Sahara, Shigeo Kuroda, Kanji Otsuka, Masao Kawamura, Hinoko Kurosawa, Kazuya Ito
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