Endpoint and uniformity determinations in material layer processing through monitoring multiple surface regions across the layer

The method of claim wherein the indication providing step includes providing said indication in response to a determination that breakthrough has occurred in all of said regions.

The method of claim wherein the monitoring method occurs in a process wherein the material removing substance is a liquid.

The method of claim wherein the monitoring method occurs in a process wherein the material removing substance is a plasma.

In a multi-step process of forming a given multi-layer structure on a plurality of articles in time sequence, a method of controlling the process comprising the steps of:

• measuring uniformity across a surface while one step of the process is being performed on one of the articles, wherein said uniformity measuring step includes the step of separately monitoring at least two separate regions across said surface,
• comparing the monitored uniformity with a standard to determine whether the degree of uniformity is within preset limits, and
• if the degree of uniformity is not within preset limits, modifying a subsequent process step on the same article in order to compensate for an unacceptable degree of uniformity on that article.

In a multi-step process of forming a given multi-layer structure on a plurality of articles in time sequence, a method of controlling the process comprising the steps of:

• measuring uniformity across a surface while one step of the process is being performed on one of the articles, wherein said uniformity measuring step includes the step of separately monitoring at least two separate regions across said surface,
• comparing the monitored uniformity with a standard to determine whether the degree of uniformity is within preset limits, and
• if the degree of uniformity is not within preset limits, modifying the one process step on a subsequently processed article.

In a multi-step process of forming a given multi-layer structure on a plurality of articles in time sequence, a method of controlling the process comprising the steps of:

• measuring uniformity across a surface while one step of the process is being performed on one of the articles, wherein said uniformity measuring step includes the step of separately monitoring at least two separate regions across said surface,
• comparing the monitored uniformity with a standard to determine whether the degree of uniformity is within preset limits, and
• if the degree of uniformity is not within preset limits, modifying a prior process step on a subsequently processed article.

In a multi-step process of forming a given multi-layer structure on a plurality of articles in time sequence, a method of controlling the process comprising the steps of:

• measuring uniformity across a surface while one step of the process is being performed on one of the articles, wherein said uniformity measuring step includes the step of separately monitoring at least two separate regions across said surface,
• calculating an overprocess time based upon results of said uniformity measuring step, said over process time being sufficiently long to ensure that breakthrough has been achieved across at least a portion of said surface, and
• terminating said process at the end of said overprocess time.

In a multi-step wet etching process of forming a given multi-layer structure on a plurality of articles in time sequence, a method of controlling the process comprising the steps of:

• measuring uniformity across a surface while one step of the wet etching process is being performed on one of the articles, said uniformity measuring step including the step of separately monitoring removal of material from said surface in each of at least two separate regions across said surface,
• comparing the monitored uniformity with a standard to determine whether the degree of uniformity is within preset limits, and
• if the degree of uniformity is not within preset limits, modifying the wet etching process.