Laternal field emmission devices and methods of fabrication
AssigneeInternational Business Machines Corporation
InventorsJohn E. Cronin, Kent E. Morrett, Michael D. Potter, Timothy D. Sullivan
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AssigneeInternational Business Machines Corporation
InventorsJohn E. Cronin, Kent E. Morrett, Michael D. Potter, Timothy D. Sullivan
Estimating the term…
Lateral cathode field emission devices and methods of fabrication are set forth. Conventional integrated circuit fabrication techniques are advantageously used to produce the lateral FEDs. Cathode tips on the order of several hundred angstroms are consistently obtained as well as exact spacing of the cathode to gate and cathode to anode. Various cathode and device configurations are described, including a circular field emission device. A single integrated structure having multiple cathodes and multiple gates is possible to perform various logic operations and/or enhance current output from the device. Multiple field effect devices, with cathodes disposed parallel or perpendicular to the substrate, are integrally coupled through a sharing of one or more metallization layers definitive of the elements of the devices. Significant advantages in current density and circuit layout can be obtained. Methods for fabricating the various devices are also explained.
A method of fabricating a field emission device, said method comprising the steps of:
Dependencies are inferred from the claim text.