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US 5,307,693 AGranted
Force-sensing system, including a magnetically mounted rocking element
AssigneeAT&T Bell Laboratories
InventorsJoseph E. Griffith, Gabriel L. Miller
Life of this patent
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Abstract
A force-sensing system suitable, for example, for atomic force microscopy. This system includes a rocking beam, a base, and means for supporting the beam adjacent a surface of the base such that the beam can pivot about at least one axis parallel to the base surface. In contrast to rocking-beam systems of the prior art, the support means comprise at least one pivot element that can be held against the base surface by a magnetic field.
Claims8
A force-sensing system which comprises:
- a) a base member having a principal surface at least a portion of which is substantially planar and electrically conductive;
- b) a rocker element having a principal surface at least a portion of which is substantially planar and electrically conductive;
- c) at least one pivot element for supporting the rocker element on the base member such that:
- said base-surface portion faces said rocker-surface portion, the rocker element can be tilted about at least one axis parallel to said base-surface portion;
- and at least one capacitance is defined between said base-surface portion and said rocker-surface portion;
- and
- d) means for controlling the capacitance;
- characterized in that
- e) the pivot element comprises magnetic material;
- and
- f) the force-sensing system further comprises means for providing a magnetic field adapted to hold the pivot element against the base principal surface.
8 more elements
Dependencies are inferred from the claim text.