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US 5,307,568 AGranted
Gas supply system
AssigneeTokyo Electron Limited
InventorsTakenobu Matsuo, Tsuyoshi Wakabayashi, Shjui Moriya
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Abstract
A gas supply system includes a gas source containing a process gas to be supplied in a reduced-pressure container, a piping unit including a metallic pipe through which the process gas circulates and arranged between the gas supply source and the reduced-pressure container, and a duct formed of a metallic and/or nonmetallic pipe and arranged between the piping unit and the reduced-pressure container. At least part of the duct is formed of an austenitic stainless steel containing 6% or more of molybdenum by weight.
Claims10
A gas supply system comprising:
- a gas source for supplying a process gas to a reduced-pressure vessel;
- a piping unit including a metallic pipe arranged between said gas source and said reduced-pressure vessel through which said process gas circulates;
- and
- a conduit, at least a part of which is composed of a metal, arranged between said piping unit and said reduced-pressure vessel, wherein a part of said conduit which is composed of a metal comprises an austenitic stainless steel containing 6% or more of molybdenum by weight.
1 more element
Dependencies are inferred from the claim text.