Thin film forming apparatus

An elemental analyzer comprising:

• an excitation source for exciting more than one element present in the neighborhood of the surface of a sample to emit the characteristic X-ray of that each element;
• means defining a slit for picking up the emitted characteristic X-ray of each element at angles of a range that includes the angle of total reflection of each of said characteristic X-rays from the surface of said sample;
• means for ensuring that said characteristic X-rays passing through said slit are totally reflected at angles corresponding to said individual elements such that the intensities of X-rays emitted by the elements are at a similar level;
• and
• an X-ray detector for detecting the characteristic X-rays reflected from said means for ensuring.

A thin-film forming apparatus comprising:

• a mechanism in a vacuum chamber for producing a sample by a thin-film forming process;
• and
• an elemental analyzer for measuring the composition of said sample as it is produced, said elemental analyzer comprising:
• an excitation source that excites the elements in said sample to emit characteristic X-rays;
• a total reflecting mirror for reflecting said characteristic X-rays;
• an X-ray detector for detecting the characteristic X-rays as reflected from said total reflecting mirror;
• means for defining slits that determine the range of incident angles for the characteristic X-rays that are to be incident on said total reflecting mirror, as well as the range of exit angles for those characteristic X-rays which have been reflected from said total reflecting mirror and which reach said detector;
• and
• a shield for isolating said X-ray detector from light and heat and that is heat-resistant and transmissive of at least fluorescent X-rays containing soft X-rays of 1 keV and below.

A method of analyzing more than one element present in the neighborhood of the surface of a sample, said method comprising the steps of:

• applying energy particles to the surface of said sample;
• picking up a plurality of electromagnetic waves, emitted by each of the elements present in the neighborhood of said surface as a result of excitation due to said step of applying energy particles, at angles of a range that includes the angles of total reflection of each of said electromagnetic waves from said surface;
• reflecting all of the picked up electromagnetic waves at angles such that the intensities of X-rays emitted by the elements are at a similar level;
• and
• subjecting said totally reflected electromagnetic waves to spectroscopy for detection.

A method of analyzing more than one element present in the neighborhood of the surface of a sample, said method comprising the steps of:

• allowing a first electromagnetic wave to fall on the surface of said sample at angles of a range that includes the angle of total reflection of that electromagnetic wave from the surface of said sample;
• picking up a plurality of second electromagnetic waves, emitted by each of the elements present in the neighborhood of said surface as a result of excitation due to said step of allowing, at angles of a range that includes the angle of total reflection of each of said second electromagnetic waves from said surface;
• reflecting all picked up second electromagnetic waves at angles such that the intensities of X-rays emitted by the elements are at a similar level;
• and
• subjecting said totally reflected second electromagnetic waves to spectroscopy for detection.

An elemental analyzer comprising:

• an excitation source for exciting more than one element present in the neighborhood of the surface of a sample to emit the characteristic X-ray of each element;
• means defining a slit for picking up the emitted characteristic X-ray of each element at angles of a range that includes the angle of total reflection of each of said characteristic X-rays from the surface of said sample;
• means for causing total reflection of said characteristic X-rays passing through said slit at angles such that the intensity of X-rays emitted by the elements is at a similar level;
• and
• an X-ray detector for detecting the characteristic X-rays reflected from said means for causing total reflection.

A method of analyzing more than one element present in the neighborhood of the surface of a sample, said method comprising the steps of:

• applying first electromagnetic waves to the surface of said sample;
• picking up a plurality of second electromagnetic waves, emitted by each of the elements present in the neighborhood of said surface as a result of excitation due to said step of applying, at angles of a range that includes the angle of total reflection of each of said second electromagnetic waves from said surface;
• reflecting all picked up second electromagnetic waves at angles such that the intensities of X-rays emitted by the elements are at a similar level;
• subjecting said totally reflected second electromagnetic waves to spectroscopy for detection.

An elemental analyzer comprising:

• an excitation source for exciting more than one element present in the neighborhood of the surface of a sample to emit the characteristic X-ray of each element;
• means defining a slit for picking up the emitted characteristic X-ray of each element at angles of a range that includes the angle of total reflection of each of said characteristic X-rays from the surface of said sample;
• a mirror having a curvature in two axial directions, constructed and arranged so that the characteristic X-rays passing through the slit are totally reflected and subsequently focused at angles such that the intensities of X-rays emitted by the elements are at a similar level;
• and
• an X-ray detector for detecting the characteristic X-rays reflected from said mirror.