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US 5,298,367 AGranted
Production of micromoldings having a high aspect ratio
AssigneeBASF SE
InventorsPeter Hoessel, Gerhard Hoffmann, Thomas Wuensch, Juergen Langen
Life of this patent
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Abstract
A process for the production of micromoldings having a high aspect ratio by imagewise irradiation of a polymer with high-energy, parallel radiation from an X-ray source employs, as the polymer, a copolymer comprising SO.sub.2 and one or more ethylenically unsaturated organic compounds.
Claims1
A process for the production of microstructures which comprises:
- imagewise irradiating with high-energy, parallel X-ray radiation from a synchrotron, a copolymer of the formula [SO.sub.2 ].sub.m [M].sub.n prepared by reacting SO.sub.2 and one or more ethylenically unsaturated organic compounds where M are identical or different polymerized monomer units of ethylenically unsaturated organic compounds as the copolymerized constituent of the copolymer and m and n are integers, where m+n=50 to 10,000 and m=5 to 50% of m+n, and M is identical or different polymerized units of the formula ##STR8## where R.sup.1, R.sup.2, R.sup.3 and R.sup.4 may be identical or different and are H, alkyl having 1 to 10 carbon atoms, or isoalkyl having 3 to 10 carbon atoms, or R.sup.2 and R.sup.4 are bonded together to form a 5- to 7-membered ring, and
- exposing the irradiated co-polymer to the action of a selective developer, thereby structuring the co-polymer to a depth of from 50 .mu.m to 1000 .mu.m with lateral dimensions of less than 10 .mu.m.
Dependencies are inferred from the claim text.