Coating a heat curable liquid dielectric on a substrate
AssigneeMicroelectronics and Computer Technology Corporation
InventorsJohn W. Curry, II, Douglas A. Pietila
Life of this patent
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Abstract
A porous substrate curtain coated with a single coating of a liquid dielectric that is cured into a well adhering film at least 15 microns thick with a uniformity of less than 5 microns. The substrate is cleaned to remove contaminants, heated to remove moisture, curtain coated with a single coating of a viscous heat curable liquid dielectric such as polyimide, and heated to cure the dielectric by increasing the temperature at most 15.degree. C. per minute to a predetermined cure temperature not exceeding 450.degree. C. The invention is well suited for fabricating a dielectric layer in a high density multichip module.
Claims28
A method for coating a polymeric dielectric on a substrate, comprising the following steps:
- applying a single coating of a heat curable liquid polymeric dielectric over the substrate;
- and
- heating the liquid polymeric dielectric at most 15.degree. C. per minute to a cure temperature above 225.degree. C. but not exceeding 450.degree. C., thereby providing from the single coating a cured polymeric dielectric film at least 15 microns thick with a uniformity of less than 5 microns which adheres to the substrate.
A method for coating a polymeric dielectric on a substrate, comprising the following steps in the sequences set forth:
- removing contaminants from the substrate that might otherwise substantially interfere with adhesion or curing of said polymeric dielectric on the substrate;
- heating the substrate to remove moisture that might otherwise substantially interfere with the adhesion or curing of said polymeric dielectric on the substrate;
- depositing a single coating of a liquid polymeric dielectric on the substrate before the substrate receives sufficient contaminants or absorbs sufficient moisture to substantially interfere with the adhesion or curing of the polymeric dielectric;
- and
- heating the liquid polymeric dielectric at most 15.degree. C. per minute to a cure temperature about 225.degree. C. but not exceeding 450.degree. C., thereby providing from the single coating a cured polymeric dielectric film at least 15 microns thick with a uniformity of less than 5 microns which adheres to the substrate.
A method for coating a polymeric dielectric on a substrate, comprising the following steps:
- removing contaminants from the substrate that might otherwise substantially interfere with adhesion or curing of the polymeric dielectric on the substrate;
- heating the substrate to remove moisture that might otherwise substantially interfere with the adhesion or curing of the polymeric dielectric on the substrate;
- curtain coating the substrate with a single coating of a heat curable liquid polymeric dielectric before the substrate receives sufficient contaminants or absorbs sufficient moisture to substantially interfere with the adhesion or curing of the polymer dielectric, said curtain coating including
- i) forcing the liquid polymeric dielectric through a slit in a dispenser spaced above the substrate onto the substrate, and
- ii) moving the substrate linearly with respect to the dispenser so that the liquid polymeric dielectric is deposited on the entire substrate;
- and
- heating the liquid polymer dielectric at most 15.degree. C. per minute to a cure temperature above 225.degree. C. but not exceeding 450.degree. C., thereby providing from the single coating a cured polymeric dielectric film at least 15 microns thick with a uniformity of less than 5 microns which adheres to the substrate.
A method for coating a polymeric dielectric on a substrate, comprising the following steps:
- applying a single coating of a heat curable liquid polymeric dielectric over the substrate;
- and
- heating the liquid polymeric dielectric at most 15.degree. C. per minute to a cure temperature about 170.degree. C. but not exceeding 450.degree. C., wherein the liquid polymeric dielectric is heated at least three different rates of temperature increase, a before first rate being greater than a second rate, the third rate being greater than the first rate, thereby providing from the single coating a cured polymeric dielectric film at least 15 microns thick with a uniformity of less than 5 microns which adheres to the substrate.
A method for coating a polymeric dielectric on a substrate, comprising the following steps in the sequence set forth:
- removing contaminants from the substrate that might otherwise substantially interfere with adhesion or curing of the polymeric dielectric on the substrate;
- heating the substrate to remove moisture that might otherwise substantially interfere with the adhesion or curing of the polymeric dielectric on the substrate;
- depositing a single coating of a liquid polymeric dielectric on the substrate before the substrate receives sufficient contaminants or absorbs sufficient moisture to substantially interfere with the adhesion or curing of the polymeric dielectric;
- and
- heating the liquid polymeric dielectric at most 15.degree. C. per minute to a cure temperature about 170.degree. C. but not exceeding 450.degree. C., wherein the liquid polymeric dielectric is heated at least three different rates of temperature increase, a first rate being greater than a second rate, a third rate being greater than the first rate, thereby providing from the single coating a cured polymeric dielectric film at least 15 microns thick with a uniformity of less than 5 microns which adheres to the substrate.
A method for coating a polymeric dielectric on a substrate, comprising the following steps:
- removing contaminants from the substrate that might otherwise substantially interfere with adhesion or curing of the polymeric dielectric on the substrate;
- heating the substrate to remove moisture that might otherwise substantially interfere with the adhesion or curing of the polymeric dielectric on the substrate;
- curtain coating the substrate with a single coating of a heat curable liquid polymeric dielectric before the substrate receives sufficient contaminants or absorbs sufficient moisture to substantially interfere with the adhesion or curing of the polymeric dielectric, said curtain coating including
- i) forcing the liquid polymeric dielectric through a slit in a dispenser spaced above the substrate onto the substrate, and
- ii) moving the substrate linearly with respect to the dispenser so that the liquid polymeric dielectric is deposited on the entire substrate;
- and
- heating the liquid polymeric dielectric at most 15.degree. C. per minute to a cure temperature above 170.degree. C. but not exceeding 450.degree. C., wherein the liquid polymeric dielectric is heated at least three different rates of temperature increase, a first rate being greater than a second rate, a third rate being greater than the first rate, thereby providing from the single coating a cured polymeric dielectric film at least 15 microns thick with a uniformity of less than 5 microns which adheres to the substrate.
Dependencies are inferred from the claim text.