Ion source device

An ion source device comprising:

• an electron generating chamber;
• an electron attraction electrode connected to the electron generating chamber through a first insulating member;
• electrode through a second insulating member;
• a bottom plate connected to said side walls through a third insulating member, said side walls and said bottom plate being combined to substantially define an ion generating chamber, and said ion generating chamber being communicated with said electron generating chamber through apertures of said electron attraction electrode and having an opening in one of said side walls to emit ions;
• means for generating plasma in the ion generating chamber, said plasma containing those ions to be emitted through the opening of said side wall;
• a fourth insulating member contacted with the underside of said bottom plate, said first through fourth insulating members being detachably combined with their adjacent ones;
• a pair of projections projected from both sides of said electron generating chamber;
• a holder plate contacted with the underside of said fourth insulating member and having a recess on its underside;
• a fixing member contacted with the underside of said holder plate and including a body, a pusher fitted into the recess of said holder plate and struck against the top of said recess, and springs for elastically supporting the pusher in the body;
• and
• a pair of holder members arranged along both sides of the device, each holder member being engaged with said electron generating chamber and said fixing member through a first engaging means detachably engaged with its corresponding projection of said electron generating chamber and through a second engaging means detachably engaged with said fixing member;
• wherein said components ranging from the electron generating chamber to the holder plate are held and fixed between the projections of said electron generating chamber and the pusher of said fixing member through said holder members.