Specimen heating device for use with an electron microscope
AssigneesHitachi, Ltd., Hitachi Instruments Engineering Co., Ltd.
InventorsHiroyuki Kobayashi, Takeo Kamino, Masahiro Tomita
Life of this patent
Estimating the term…
Abstract
A specimen to be irradiated with an electron beam is supported by a heating member secured detachably to a specimen holder and the heating member, a power supply therefor and electric conductive lines for conducting a electric power from the power supply to the heating member are integrated into the specimen holder.
Claims7
A specimen heating device for use with an electron microscope, comprising a specimen holder for holding a specimen to be irradiated with an electron beam, a heating member for heating the specimen, a power supply, and electric conductor means for conducting an electric power from the power supply to the heating member, the heating member, the power supply and the electric conductor means being integrated into the specimen holder.
Dependencies are inferred from the claim text.