Apparatus for assessing a particular property in a medium
AssigneeUniversity of Strathclyde
InventorsBrian Culshaw, Anthony P. F. Turner
Life of this patent
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AssigneeUniversity of Strathclyde
InventorsBrian Culshaw, Anthony P. F. Turner
Estimating the term…
A sensor is provided which is sensitive to a particular property of a medium and which is thermally activated when in contact with the property containing medium. The sensor is externally mounted on the undersurface of a silicon wafer, the upper surface of which contains a well in which a vibratile bridge element is located. The top of the well is closed off so that the vibratile bridge element is within a chamber. Excitation energy from a source is delivered to the vibratile bridge element to establish vibratory motion which is monitored and detected by a circuit. Presence of the particular property in the medium causes a thermal change in the wafer resulting in a change in the resonance frequency of the vibratory motion of the vibratile bridge element. The frequency shift is a measure of the particular property.
An apparatus for assessing a particular property of a medium comprising:
Dependencies are inferred from the claim text.