Microwave treatment of photoresist on a substrate
AssigneeMotorola, Inc.
InventorsThomas J. Swirbel, Richard J. Kolcz, James L. Davis
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Abstract
Photoreactive polymers are treated by exposure to microwave energy. A film of a photoreactive polymer (12), such as a photoresist, is applied to a substrate (10) and selectively exposed to ultraviolet light. The latent image produced is further cured or polymerized by treating the photoresist with microwave energy. Combinations of microwave and thermal energies are also used. The treated photoresist is then developed, producing a sidewall (17) that is vertical, and is improved by reduction of anomolies such as scum or a foot (16) at the base of the resist.
Claims12
A method of processing photoresist, comprising:
- applying a film of photoresist to a substrate;
- exposing portions of the photoresist film;
- treating the photoresist film with microwave energy after the step of exposing and prior to a step of developing the photoresist film;
- and
- developing the photoresist film.
An improved method of processing photoresist in order to provide a straight sidewall, comprising the steps of:
- applying a photoresist to a substrate;
- exposing portions of the photoresist to ultraviolet light;
- treating the photoresist by exposing it to microwave energy after the step of exposing to ultraviolet light and prior to a developing step;
- and
- developing the photoresist in order to create an image.
A method of processing photoresist in order to provide a straight sidewall, comprising the steps of:
- applying a dry film photoresist to a substrate;
- exposing the photoresist to a pattern of ultraviolet light to create a latent image;
- placing the substrate and photoresist in a microwave oven;
- curing the photoresist by exposing it to microwave energy after the step of exposing to ultraviolet light and prior to a developing step;
- and
- developing the photoresist with a liquid developer in order to develop the latent image.
Dependencies are inferred from the claim text.