Etchant for production of electrode plate structure for liquid crystal display device
AssigneeCanon Kabushiki Kaisha
InventorsTakashi Enomoto, Masayuki Shimamune, Keishi Danjo
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Abstract
An ITO (indium tin oxide) film on a substrate is effectively etched by an etchant which is an aqueous solution containing hydrogen iodide and ferric chloride to form an electrode plate structure for liquid crystal display device. The etchant does not corrode an Mo or Mo alloy film and accordingly can selectively etch the ITO film already carrying thereon a pattern of Mo or Mo alloy forming an auxiliary electrode for compensating for the resistivity of the ITO film. The etchant is also effective for etching of the ITO film formed on an organic layer.
Claims7
A process for providing an electrode plate structure for a liquid crystal display device, comprising the steps of:
- selecting a substrate having an indium tin oxide film formed thereon;
- and
- etching said indium tin oxide film formed on said substrate with an etchant comprising an aqueous solution containing hydrogen iodide and ferric chloride to form an electrode pattern of said indium tin oxide film on said substrate, wherein the etchant contains hydrogen iodide at a concentration of 19-52 wt. % and ferric chloride at a concentration of 3-21 wt. %.
A process for providing an electrode plate structure for a liquid crystal display device, comprising the steps of:
- selecting a substrate having an indium tin oxide film formed thereon;
- and
- etching said indium tin oxide film formed on said substrate with an etchant comprising an aqueous solution containing hydrogen iodide and ferric chloride to form an electrode pattern of said indium tin oxide film on said substrate, wherein the etchant comprises a mixture solution of 0.1-1.5 volume of a ferric chloride aqueous solution having an FeCl.sub.3 content of about 35 wt. % with one volume of hydroiodic acid having an HI content of 47-57 wt. %.
A process for providing an electrode plate structure for a liquid crystal display device, comprising the steps of:
- selecting a substrate having an indium tin oxide film formed thereon;
- and
- etching said indium tin oxide film formed on said substrate with an etchant comprising an aqueous solution containing hydrogen iodide and ferric chloride to form an electrode pattern of said indium tin oxide film on said substrate, wherein said substrate further comprises a pattern of molybdenum or molybdenum alloy film formed on the indium tin oxide film, and wherein the indium tin oxide film is etched relative to the pattern of molybdenum or molybdenum alloy film.
A process for providing an electrode plate structure for a liquid crystal display device, comprising the steps of:
- selecting a substrate having an indium tin oxide film formed thereon;
- and
- etching said indium tin oxide film formed on said substrate with an etchant comprising an aqueous solution containing hydrogen iodide and ferric chloride to form an electrode pattern of said indium tin oxide film on said substrate, wherein an organic layer is interposed between the indium tin oxide film and said substrate.
Dependencies are inferred from the claim text.