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US 5,296,018 AGranted
Method and apparatus for eliminating electric charges in a clean room
AssigneeTechno Ryowa Ltd.
InventorMasanori Suzuki
Life of this patent
Estimating the term…
Abstract
A method and apparatus for eliminating electric charges in a clean room is disclosed involving removing fine and superfine grains from air in the clean room, and generating ions in the thus purified air inside the room.
Claims3
A method for removing electric charges in a clean room comprising the steps of:
- removing fine grains from air supplied to the clean room by using a first filter;
- feeding the air from the first filter, which includes superfine grains, to a purifying discharge electrode, and thereby depositing superfine grains on the purifying discharge electrode to effect larger superfine grains;
- feeding the air from the purifying discharge electrode to a second filter to capture with the second filter the larger superfine grains splashed from the purifying discharge electrode;
- feeding the air from the second filter to a means partially enclosing an ion generating electrode which is provided in the clean room;
- and
- applying high voltage to the ion generating electrode to generate ions and feeding the ions into the clean room.
3 more elements
An apparatus for removing electric charges in a clean room comprising:
- a first filter means provided in the clean room for eliminating fine grains;
- ion generating electrode means provided in the clean room;
- ion generating means for applying a voltage to said ion generating electrode means to feed ions from said ion generating electrode means into the clean room;
- air discharge port for ventilating the air throughout of the clean room;
- air feed port for feeding the air to the vicinity of the ion generating electrode means;
- draft pipe means extending between said air discharge port and air feed port;
- purifying discharge electrode means provided in said draft pipe means;
- and
- second filter means provided between said discharge electrode means and said air feed port.
6 more elements
An apparatus for removing electric charges in a clean room comprising:
- a first filter means provided on the clean room for eliminating fine grains;
- ion generating electrode means provided in the clean room;
- ion generating means for applying a voltage to said ion generating electrode means to feed ions from said ion generating electrode means into the clean room;
- air discharge port for ventilating the air throughout of the clean room;
- air feed port for feeding air to the vicinity of the ion generating electrode means;
- draft pipe means extending between the air discharge port and air feed port;
- reservoir tank means for pure water provided in said draft pipe means;
- and
- means for causing purified air to bubble into said tank means.
6 more elements
Dependencies are inferred from the claim text.