US 5,295,668 A · Metal tube oxidation treatment apparatus

Abstract

It is a metal oxidation treatment apparatus for carrying out the inactivation treatment of metal tubes used especially in a super high purity gas piping system and an apparatus of super high vacuum. The support part of a support member is made as a tubular form member, and a tapered part is provided on the outer periphery thereof, and further, since a spring is mounted to be displaceable, even if fluctuation is present in the internal diameter of stainless steel tubes, it is possible to let the stainless tubes easily be supported on the support part. Also, even fluctuation of the length is present in the stainless steel tubes, the support member is always pushed to the stainless steel tubes. Oxidative gas diffusing out of the tube to be treated to the outside thereof can be released to the outside of the oxidation treatment furnace without letting it contact to the tube to be treated.

Claims10

Dependent claims

An oxidation treatment apparatus for treating a metal tube, comprising:

an oxidation treatment furnace having an inert gas inlet for introducing inert gas into said furnace, and an inert gas outlet for exhausting inert gas from aid furnace;
a first hollow support member for introducing gas from the outside of said furnace into the metal tube, said first hollow support member including a first tubular member for supporting one end of the metal tube, said first tubular member having a generally frustoconical shape;
and
a second hollow support member for exhausting gas from the inside of the tube to the outside of said furnace, said second hollow support member including a second tubular member for supporting an opposite end of the metal tube, said second tubular member having a generally frustoconical shape;
said first hollow support member including a cover tube for covering said first tubular member, said cover tube and said first tubular member defining a space therebetween which is in fluid communication with an exterior of said furnace.

2 more elements

Dependencies are inferred from the claim text.

Metal tube oxidation treatment apparatus

Life of this patent

Metal tube oxidation treatment apparatus

Life of this patent

Abstract

Claims10