Bypass unit for a flowmeter sensor
AssigneeMKS Japan, Inc.
InventorIsao Suzuki
Life of this patent
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AssigneeMKS Japan, Inc.
InventorIsao Suzuki
Estimating the term…
A bypass unit of a flowmeter sensor includes a chamber, inlet and outlet paths through which a fluid flows into and out of the chamber, an upstream bypass path through which a portion of the fluid is diverted from the chamber to a sensor tube, and a downstream bypass path through which the portion of the fluid is returned from the sensor tube to the chamber. A bypass member is arranged within the chamber and a space is defined between the peripheral wall of the housing and the bypass member. The bypass member includes inlet and outlet ports formed in coaxial relation to the inlet and outlet paths, respectively, and a plurality of radial ports. A substantially cylindrical partition is disposed between the peripheral wall of the housing and the bypass member to define a space between the peripheral wall of the housing and the partition and between the partition and the bypass member.
A bypass unit of a flowmeter sensor, said unit comprising:
Dependencies are inferred from the claim text.