Bearing for use in high resolution precision control device

Abstract

A magnetic bearing is provided which may be utilized in a fine position control or movement system. Stability is enhanced by providing separate mechanisms for supporting the weight of a platen or other object being controlled with electromagnets utilized to control or compensate for motion of the platen in N degrees of freedom. The support mechanism is preferably one or more permanent magnets having an air gap with the platen which is greater than the air gap for the electromagnets. The mechanisms for supporting the weight of the platen may be made adjustable so as to support the weight of the platen regardless of any changes in such weight by, for example, adjusting the air gap for the permanent magnet to compensate for weight changes. Resonant vibration is reduced by constructing the platen of a hollowed, cellular structure, for example, a honeycomb structure.

Dependencies are inferred from the claim text.