Cantilever displacement detection apparatus
AssigneeOlympus Optical Co., Ltd.
InventorHiroshi Kajimura
Life of this patent
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Abstract
A cantilever displacement detection apparatus comprises a laser diode for emitting a laser beam functioning as detection beam for displacement detection based on an optical lever method, and a position sensor having two light receiving regions for outputting signals corresponding to the intensity of received light. The laser diode and the position sensor are arranged such that the light beam is passed through an objective lens and made incident slantingly on a mirror provided on a free-end portion of a cantilever and the laser beam reflected by the mirror is passed through the objective lens and made incident on the position sensor.
Claims10
A cantilever displacement detection apparatus for detecting a displacement of a cantilever of an atomic force microscope or the like provided with an observation optical system including an image formation optical system and an objective lens, said apparatus comprising:
- a light source for emitting a light beam;
- and
- a position sensor for detecting a position of reception of the light beam,
- wherein the light source and the position sensor are arranged such that the light beam is passed through the objective lens and made incident obliquely on a reflection surface of a free-end portion of the cantilever and the laser beam reflected by the reflection surface is passed through the objective lens and made incident on the position sensor, thereby detecting the displacement of the cantilever on the basis of the position of reception of the beam on the position sensor.
Dependencies are inferred from the claim text.