Barrier improvement in thin films
AssigneeInternational Business Machines Corporation
InventorsMilan Paunovic, King-Ning Tu
Life of this patent
Estimating the term…
Abstract
An improved thin film barrier with three layers where an interlayer is between barrier layers on each side, the interlayer serving as an atom energy sink. The improved barrier in the diffusion of Cu through Ni into Au where the barrier layers are Ni and the interlayer is Au, making a stack of AuNiAuNiCu, reduces the Cu present in the external Au layer after prolonged annealing in the vicinity of 0.2% atomic.
Claims4
An electronic device contact structure on an electronic device body having therein a barrier for prevention of atomic interaction between a first thin film layer of Au and a second thin film layer of Cu,
- said barrier being positioned between said first and said second thin film layers, and,
- said barrier consisting of:
- a third thin film layer of Au having one surface thereof contiguous with one surface of said first thin film layer,
- a fourth thin film layer of Au having one surface thereof contiguous with the remaining surface of said third thin film layer, and,
- a fifth thin film layer of Ni having one surface thereof contiguous with the remaining surface of said fourth thin film layer and having the remaining surface thereof contiguous with one surface of said second thin film layer.
A barrier structure for prevention of atomic interaction between a first thin film layer of Au and a second thin film layer of Cu, said first and second thin film layers being of 2 micrometers or less in thickness, in an electronic device body, said barrier consisting of:
- a third thin film layer of Ni having one surface thereof contiguous with one surface of said first thin film layer,
- a fourth thin film layer of Au having one surface thereof contiguous with the remaining surface of said third thin film layer, and,
- a fifth thin film layer of Ni having one surface thereof contiguous with the remaining surface of said fourth thin film layer and having the remaining surface of said fifth thin film layer contiguous with one surface of said second thin film layer,
- said third, fourth and fifth thin film layers being 2 micrometers or less in thickness.
Dependencies are inferred from the claim text.