Polysilazane precursors for silicon nitride and resultant products
AssigneeSouthwest Research Institute
InventorStuart T. Schwab
Life of this patent
Estimating the term…
Abstract
A method of making a polysilazane comprising forming a reaction medium comprising at least one halomonosilane, an ammonium compound, and an organic solvent for said at least one halomonosilane, carrying out the reaction between said at least one halomonosilane and said ammonium compound in the absence of any catalyst, oxygen, and moisture at atmospheric pressure and at a temperature of about -80.degree. C. to 50.degree. C. for a time sufficient to form said polysilazane, and separating said polysilazane from said reaction medium.
Claims6
A method of making a perhydropolysilazane in a single reaction comprising forming a reaction medium comprising a mixture of at least one, dichlorosilane and at least one trichlorosilane, an ammonium compound, and an organic solvent for said mixture of silanes, carrying out the reaction between said mixture of silanes and said ammonium compound in the absence of any catalyst, oxygen, and moisture at atmospheric pressure and at a temperature of about -80.degree. C. to 20.degree. C. for a time sufficient to form said perhydrosilazane, and separating said perhydrosilazane from said reaction medium.
Dependencies are inferred from the claim text.