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US 5,294,312 AGranted
Method for preparing a magnetic recording medium
AssigneeNational Science Council
InventorsTsung-Shune Chin, Wei-Der Chang, Ming-Cheng Deng
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Abstract
A method for preparing a magnetic recording medium includes the steps of providing a substrate, providing an alloy composite target attaching thereon Co and Fe pellets to modify the composition of this magnetic recording medium, and utilizing the target to form a (Co,Mn) modified .gamma.-Fe.sub.2 O.sub.3 thin film on the substrate under controlled conditions. Such method can provide a magnetic recording medium which is cost-effective and has a better SNR, a better resistance to corrosion and a high coercivity.
Claims20
A method for preparing a magnetic recording medium comprising the steps of:
- (a) providing a substrate;
- (b) providing an Fe-Mn alloy target formed of manganese and iron having a purity of about 99.7% and attaching thereon Co and Fe pellets to modify a composition of said magnetic recording medium;
- and
- (c) depositing said target by one of an RF-reactive magnetron sputtering and a DC-reactive magnetron sputtering methods to form a magnetic recording medium thin film on said substrate under controlled conditions.
1 more element
Dependencies are inferred from the claim text.