Stripline laser including electrically conducting mirror
AssigneeSiemens Aktiengesellschaft
InventorsWolfgang Welsch, Hans Krueger
Life of this patent
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Abstract
A stripline laser wherein the distance between a mirror and a stripline is minimized without modifying the characteristics of the laser is provided. The stripline laser prevents damaging of the mirror due to plasma discharge by providing at least two insulating strips arranged between oppositely polarized electrodes. Electrically conductive paths lie between the insulating strips. The insulating strips are arranged to guarantee a voltage division. The voltage division maintains the voltage of the electrically conductive path neighboring the mirror below a plasma-maintaining voltage.
Claims17
A stripline laser for use with a plasma source, said stripline laser comprising:
- first and second oppositely polarized electrodes with a volume therebetween communicable with said plasma source, said electrodes in combination forming means for placing plasma in said volume at a plasma-maintaining voltage;
- an electrically conductive mirror bordering said volume;
- and
- first and second insulating paths with at least one conductive path for said plasma therebetween, said first and second insulating paths having a size and orientation for forming, in combination, voltage division means for maintaining a region of said volume adjacent said mirror at a voltage below said plasma-maintaining voltage for preventing formation of deposits on said mirror.
A stripline laser comprising:
- first and second insulating strips of a defined capacitance;
- an electrically conductive mirror;
- and
- first and second electrodes separated from said mirror by said insulating strips, where the capacitance of said insulating strips is chosen such that the voltage at said mirror lies at approximately one-half the voltage between said first and second electrodes.
A stripline laser comprising:
- an electrically conductive mirror adjoining a stripline;
- and
- voltage division means for maintaining the voltage of said mirror below a plasma-maintaining voltage.
Dependencies are inferred from the claim text.