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US 5,293,516 AGranted
Multiprobe apparatus
AssigneeInternational Business Machines Corporation
InventorsJean-Claude Fouere, Kyong-Min Kim, Pavel Smetana
Life of this patent
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Abstract
A multiprobe apparatus for probing a device having a plurality of contacts includes a holder for holding the device in a fixed position; a plurality of electrically conducting elongated probes, each probe being adapted for electrical communication with a respective one of the contacts by tangential linear contact along the length of the probe; and a probe support for supporting the probes and for maintaining the probes in electrical communication with the contacts.
Claims11
A multiprobe apparatus for probing a device having a plurality of contacts, comprising:
- a plurality of electrically conducting elongated probes, each probe comprising a wire of circular cross section, and each probe being adapted for electrical communication with a respective one of said contacts by tangential linear contact along the length of the probe;
- a probe support comprising a silicon wafer having <100>
- orientation, said silicon wafer having a plurality of grooves along the <110>
- direction, each groove corresponding to a respective one of said contacts, and each groove having a respective one of said probes disposed therein for supporting said probes and for maintaining said probes in electrical communication with said contacts;
- and
- holding means having a holding groove for fitting said device and said probe support with said probes therein, wherein said holding groove, in conjunction with the tangential linear contact of said probes with said contacts, allows said contacts to be properly contacted by said probes by alignment in one dimension.
3 more elements
Dependencies are inferred from the claim text.