Vertical-to-surface transmission electrophotonic device
AssigneeNEC Corporation
InventorHideo Kosaka
Life of this patent
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Abstract
A vertical-to-surface transmission electrophotonic device in a structure having a first distributed Bragg reflector of a first conductivity type, a first spacer layer of the first conductivity type, an active layer, a second spacer layer of a second conductivity type opposite to the first conductivity type, and a second distributed Bragg reflector of the second conductivity type, all of which are formed on a substrate to constitute a cavity in a direction perpendicular to a formation surface, characterized in that one layer of said first distributed Bragg reflector is locally thickened to constitute a double cavity, and that a light-emitting portion of a single-cavity structure and a light-receiving portion of a double-cavity structure are formed on said single substrate.
Claims2
A vertical-to-surface transmission electrophotonic device in a structure having a first distributed Bragg reflector of a first conductivity type, a first spacer layer of the first conductivity type, an active layer, a second spacer layer of a second conductivity type opposite to the first conductivity type, and a second distributed Bragg reflector of the second conductivity type, all of which are formed on a substrate to constitute a cavity in a direction perpendicular to a formation surface, characterized in that one layer of said first distributed Bragg reflector is locally thickened to constitute a double cavity, and that a light-emitting portion of a single-cavity structure and a light-receiving portion of a double-cavity structure are formed on said single substrate.
A vertical-to-surface transmission electrophotonic device in a structure having a first distributed Bragg reflector of a first conductivity type, a first spacer layer of the first conductivity type, an active layer, a second spacer layer of a second conductivity type opposite to the first conductivity type, a second distributed Bragg reflector of the second conductivity type, a third spacer layer of the second conductivity type, and a third distributed Bragg reflector of the second conductivity type, all of which are formed on a substrate to constitute a double cavity in a direction perpendicular to a formation surface, characterized in that said third spacer layer and said third distributed Bragg reflector are partially removed to constitute a single cavity, and that a light-receiving element of a double-cavity structure and a light-emitting element of a single-cavity structure are formed on said single substrate.
Dependencies are inferred from the claim text.