Reflecting illumination type projecting device
AssigneeAsahi Kogaku Kogyo Kabushiki Kaisha
InventorsKazushi Yoshida, Ryota Ogawa, Tetsuya Abe
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Abstract
A reflecting illumination type projecting device includes a projecting lens having an optical axis intersecting an object to be tested, a light source portion for illuminating the object through the projecting lens, a screen onto which an image of the object is projected by light reflected on the object through the projecting lens, and an optical path separating element disposed in the vicinity of an exit pupil, the element being formed with a total reflecting mirror portion for reflecting either the illuminating light or the reflected light and with a transmitting portion for transmitting the remaining light, thereby to make the illuminating light incident to the projecting lens and to guide the reflected light toward the screen.
Claims15
A reflecting illumination type projecting device, comprising:
- a projection lens having an optical axis intersecting an object having a pattern to be projected;
- a light source for illuminating said object through said projecting lens;
- a screen onto which an image of said object is projected by light that is reflected from said object and which passes through said projecting lens;
- and
- an optical path separating element disposed substantially at an exit pupil of said projecting lens, said optical path separating element being formed with a total reflecting mirror portion for reflecting substantially all illumination light or reflected light, said optical path separating element having a transmitting portion for transmitting a remaining light, thereby making said illumination light incident to said projecting lens and guiding said reflecting light towards said screen.
A reflecting illumination type projecting device, comprising:
- a projecting lens having an optical axis intersecting an object having a pattern to be projected;
- a light source for illuminating said object through said projecting lens;
- a screen onto which an image of said object is projected by light that is reflected from said object and passed through said projecting lens;
- and
- an optical path separating element disposed substantially at an exit pupil of said projecting lens, said optical path separating element being formed with a first total reflecting mirror portion for reflecting substantially all of an illuminating light, so that illuminating light is made incident to said projection lens, and a second total reflecting mirror portion for reflecting substantially all of a reflected light, so that said reflected light is guided to a side of said screen having a diameter of said projecting lens positioned therebetween.
A reflecting illuminating projecting device comprising:
- a projecting lens having an optical axis intersecting an object having a pattern to be projected;
- a light source for illuminating said object through said projecting lens;
- ring light flux forming means for forming illuminating light from said light source into a ring shape;
- a screen onto which an image of said object is projected by light that is reflected from said object and passed through said projecting lens;
- and
- an optical path separating element disposed substantially at an exit pupil of said projecting lens, said optical path separating element being provided, at a peripheral portion of said optical path separating element with respect to the optical axis of said projecting lens, with a total reflecting mirror portion for reflecting an illuminating light towards said projecting lens and, at a central portion, with a transmitting portion for transmitting reflected light towards said screen.
Dependencies are inferred from the claim text.