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US 5,293,045 AGranted
Electrostatic lens
AssigneeKabushiki Kaisha Toshiba
InventorsMotosuke Miyoshi, Katsuya Okumura, Yuichiro Yamazaki
Life of this patent
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Abstract
An electrostatic lens having at least three electrodes and an insulating holder for holding the electrodes, the inner wall of the holder being coated with a silicone carbide film. The silicone carbide film may be formed by means of a vapor deposition method. The energy of an electron beam is set to 1.5 keV or lower. The silicone carbide film may be added with an additive for controlling the electric conductivity of the silicone carbide film. The additive may be nitrogen.
Claims9
An electrostatic lens comprising:
- at least three electrodes;
- and
- an insulating holder for holding said at least three electrodes in an inner wall, the inner wall of said holder being coated with a silicone carbide film.
Dependencies are inferred from the claim text.