Chloro-terminated polysilane and process for making
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsShigeru Mori, Eiichi Tabei, Hisashi Umehara
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Abstract
The invention provides a novel chloro-terminated polysilane of the formula: Cl[(R.sup.1 R.sup.2 Si)n (R.sup.3 R.sup.4 Si)m]kCl (1) wherein R.sup.1, R.sup.2, R.sup.3 and R.sup.4 are alkyl and aryl groups, n, m and k are numbers in the range: 0.ltoreq.n.ltoreq.10, 0.ltoreq.m.ltoreq.10, n+m.gtoreq.10, and k.gtoreq.1, especially k.gtoreq.5. It is prepared by exposing a high-molecular weight polysilane in chlorinated hydrocarbon to ultraviolet radiation in an inert gas atmosphere.
Claims10
A process for preparing a chloro-terminated polysilane comprising the step of exposing a chlorinated hydrocarbon solution of a high molecular weight polysilane to ultraviolet radiation in an inert gas atmosphere.
Dependencies are inferred from the claim text.