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US 5,291,775 AGranted
Scanning force microscope with integrated optics and cantilever mount
AssigneeTopometrix
InventorsRonald C. Gamble, Paul G. West
Life of this patent
Estimating the term…
Abstract
The scanning force microscope includes integrated optics for viewing the optical lever arm, probe and sample to be examined. The scanning force microscope includes an improved mount for the probe, which is magnetically secured to the body of the scanning force microscope, to improve ease of handling and mounting the probe assembly. In one preferred embodiment the scanning force microscope, also includes a base portion with a fluid cell for receiving a sample in a sealed gas or liquid environment.
Claims16
A scanning force microscope for examining surface contours of a specimen, comprising:
- a stationary body;
- scanning means for mounting of said specimen for examination by said scanning force microscope, said scanning means being secured to said stationary body and adapted to move said specimen in three degrees of freedom relative to said body;
- optical lever arm means secured to said stationary body, said optical lever arm means including a reflective surface;
- probe means secured to said optical lever arm means and including a probe tip adapted to contact and follow the surface contours of the specimen with a substantially constant amount of force;
- laser light source means for producing a focused laser beam directed at and deflected by said optical lever arm means;
- photodetector means for receiving said laser beam deflected by said optical lever arm means and generating an output indicative of a degree of deflection of said laser beam by said optical lever arm means, said photodetector means being mounted in said stationary body;
- and
- means for viewing said probe means adjacent to said surface contours of said specimen, said means for viewing being disposed in said stationary body.
5 more elements
Dependencies are inferred from the claim text.