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US 5,291,665 AGranted
Drying method and apparatus using hot D.I. water
AssigneeSpeedfam Clean Systems, Co., Ltd.
InventorHaruo Yoshikawa
Life of this patent
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AssigneeSpeedfam Clean Systems, Co., Ltd.
InventorHaruo Yoshikawa
Estimating the term…
Described herein are method and apparatus using a hot D.I. water bath for drying a wet work, for example, for draining and drying a wet work to dissipate water droplets completely from the work surface subsequent to a washing operation, permitting a high precision drying operation precluding disturbances by air bubbles of the water surface at the time of lifting the work out of the hot D.I. water bath. Prior to sending D.I. water to a heater, it is passed through a deaerator to reduce dissolved gas content to a level lower than a saturated solubility at a given temperature, and then heated to a predetermined temperature to prepare hot D.I. water for supply to the hot D.I. water bath; or alternatively D.I. water is heated to a predetermined temperature and supplied to a hot D.I. water bath through a water feed conduit via a bubble trapping chamber to remove air bubbles therefrom. A wet work is heated by immersion in the hot D.I. water bath and then lifted up to drain and dry same.
A method of drying a wet work with hot deionized water, comprising:
A method of drying a wet work with hot deionized water, comprising:
An apparatus for drying a wet work with hot deionized water, said apparatus including a hot deionized water bath for immersing a work, and a hot deionized water supply means for supplying hot deionized water of a predetermined temperature to said bath, characterized in that said hot deionized water supply means comprising:
An apparatus for drying a wet work with hot deionized water, including a hot deionized water bath for immersing a work therein, and a hot deionized water supply means for supplying hot deionized water of a predetermined temperature to said bath, characterized in that said hot deionized water supply means comprises:
An apparatus for drying a wet work with hot deionized water, comprising a hot deionized water bath for immersing a work therein, a water inlet associated with said bath and a bubble trap within said water bath covering said water inlet to collect air bubbles and discharge them to the outside of the water bath.
An apparatus for drying a wet work with hot deionized water, comprising a hot deionized water bath for immersing a work therein and a hot deionized water supply means for supplying hot deionized water to said bath and a deaeration means for removing dissolved gasses from the deionized water supplied to said bath.
Dependencies are inferred from the claim text.