Manufacturing method for waveguide-type optical components

Abstract

A method for manufacturing waveguide-type optical components featuring a lower propagation loss at low cost in which a lower clad section (2) made of silica glass is formed on a substrate (1), and an antistatic layer and a mask layer having a desired pattern are formed on the surface of the lower clad section (2) in the order they are listed. Then, an electron beam is irradiated from above the mask layer to produce a core (6) of the desired pattern in the lower clad section (2), the mask layer and the antistatic layer are removed to expose the surface of the lower clad section (2), and an upper clad section (7) having a lower refractive index than the core (6) is formed on the exposed surface of the lower clad section (2), thus producing an optical component. The surface of the whole optical component is at a distance from the core; therefore, the scattering loss caused by minute irregularities on the surface of the optical component is reduced.

Dependencies are inferred from the claim text.