High resolution optical microscope and irradiation spot beam-forming mask
AssigneesIsao Shimizu, Japan Synthetic Rubber Co., Ltd.
InventorsIsao Shimizu, Seiji Aotani
Life of this patent
Estimating the term…
Abstract
A high resolution optical microscope consists of an irradiation spot beam-forming mask which is disposed in a dark or a bright field, whereby a diameter of each of a plurality of irradiation spot beams onto an object to be measured is made smaller than a size of the object, beyond Rayleigh's resolution limit. In the irradiation spot beam-forming mask, a phase array is regularly disposed in a two-dimensional direction so that neighboring portions of each of the irradiation spot beams are optically phase-shifted from one another at 180.degree.. Thus, a wide observation surface and a prompt measurement can be performed with a high resolution of 0.1 .mu.m or less, far beyond Rayleigh's resolution limit.
Claims7
A high resolution optical microscope comprising:
- means for forming an irradiation spot beam in such a way that a phase arrangement is regularly arranged in the two-dimensional direction so that each of neighboring portions of a plurality of coherent irradiation spot beams for irradiating onto an object to be measured is optically phase-shifted from one another at 180.degree.;
- and
- means for converging said plurality of coherent irradiation spot beams so that a diameter of each of said plurality of coherent irradiation spot beams is made smaller than a size of said object and for illuminating said object by said plurality of converged irradiation spot beams.
Dependencies are inferred from the claim text.