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US 5,290,761 AGranted
Process for making oxide superconducting films by pulsed excimer laser ablation
AssigneeE. I. Du Pont de Nemours and Company
InventorsKenneth B. Keating, Stephens S. The'
Life of this patent
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Abstract
A process for producing thin films of superconducting material by bombarding a heated target with radiation from pulsed high energy UV laser to form a plume of target material, and depositing the plume on a substrate is disclosed.
Claims9
A process for the deposition of an oxide superconducting film onto a substrate by pulsed excimer laser ablation of a target material wherein the improvement comprises heating the target material to within about 500.degree. C. below its melting point prior to an during ablation.
Dependencies are inferred from the claim text.