Method of manufacturing semiconductor device
AssigneeNEC Corporation
InventorAkira Sato
Life of this patent
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Abstract
According to the present invention, in the ion implantation step in manufacturing a semiconductor device, a resist of a resist pattern formed on a portion of a semiconductor wafer is removed from the outer peripheral portion of the semiconductor wafer, and ion implantation is performed through the resist pattern. Since the resist is removed from the outer peripheral portion, a contact portion between a semiconductor wafer fixing portion of an ion implantation unit and the semiconductor wafer is conductive. Therefore, charges generated by the ion implantation escape from the wafer fixing portion, and the semiconductor wafer is not charged, thereby preventing electrostatic breakdown.
Claims2
A method of manufacturing a semiconductor device comprising the steps of:
- coating an entire surface of a semiconductor wafer with an insulating resist;
- exposing and developing said coated insulating resist to form a resist pattern at an inner peripheral portion of said semiconductor wafer and to remove said insulating resist from an outer peripheral portion of said semiconductor wafer;
- the outer peripheral portion of said semiconductor wafer from which said insulating resist is removed being placed in surface contact with a fixing portion of an ion implantation unit, so that charges accumulated in said semiconductor wafer during an ion implantation step escape through said fixing portion;
- and
- performing ion implantation to said semiconductor wafer through said insulating resist pattern.
Dependencies are inferred from the claim text.