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US 5,290,416 AGranted
Unidirectional field generator
AssigneeRead-Rite Corporation
InventorsHua-Ching Tong, John J. Newman, Hon-Sian J. Wu
Life of this patent
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Abstract
An apparatus for depositing magnetic material on a substrate uses a magnet assembly formed of permanent magnet pieces that provide a uniaxial magnetic field. The magnet assembly is preferably made from ceramic magnetic tiles that are joined to form an arcuate strip. The permanent magnet strip is located external to the deposition chamber and positioned so that the magnetic flux lines traverse a workpiece or wafer seated within the chamber.
Claims12
An apparatus for depositing magnetic material on a substrate, comprising:
- a sputter chamber enclosed by a housing wall;
- a support positioned within said chamber on which said substrate is adapted to be seated;
- a permanent magnet assembly formed as a single integrated structure located external to and spaced from said housing wall, said assembly comprising a multiplicity of permanent magnet pieces disposed in rows and columns, said single structure being formed of a continuous array of said permanent magnetic pieces, all of said pieces being joined to form said continuous array, said magnet assembly providing a uniaxial magnetic field across the area of said substrate and being formed without a flux return element, so that the magnetic moments of said magnetic material are aligned during the deposition process.
Dependencies are inferred from the claim text.